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This publication is protected and available only for logged users.
This publication is protected and available only for logged users.

Title: Warstwy dielektryczne tlenowęglika krzemu (a-SiOC:H) wytwarzane z prekursorów krzemoorganicznych metodą CVD inicjowaną atomowym wodorem

Publisher:

nakł. autora

Place of publication:

Łódź

Language:

polski

Identifier:

392/Pr ; oai:cybra.lodz.pl:27881

Digitization:

119 str.

Location of original:

Biblioteka CBMiM PAN

Object collections:

Last modified:

May 7, 2025

In our library since:

May 7, 2025

Number of object content hits:

0

All available object's versions:

https://cybra.lodz.pl/publication/31456

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